What is Attolight?
Nanometer-resolution CL with pico-second timing for semiconductor defect inspection
HQ Country
Lausanne, Switzerland
HQ Full Address
Lausanne, Switzerland
Product Features & Capabilities
- Allalin multi-spectroscopic CL SEM platform
- Mönch CL add-on for STEM
- Säntis 300 full wafer CL SEM
- Spectrally-resolved quantitative CL analysis
- Time-resolved cathodoluminescence (TRCL) capabilities
Other Considerations
30+ systems installed globally; Partnerships with Korea ITS and Loughborough University; Trusted by top semiconductor companies and research institutes including CEA-LETI, Lawrence Berkeley National Lab, and Yale University